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AI and TCAD for Inverse Design and Defect Discovery: From Simple Machine Learning to LLM

arXiv · AI, language, vision and robotics · article · Sep 7, 2026 · UTC

AI has revolutionized various engineering domains, but its impact on semiconductor device design and defect discovery is still limited, due to limited data and the curse of dimensionality. In this paper, we will discuss our work on using the Technology Computer-Aided-Design (TCAD) to generate precise data needed for machine learning (ML) to enable simulation-augmented ML. We demonstrate that with minimal domain expertise, it is possible to create a machine that performs as well as a device engineer on a specific task. We will show that auto-encoder-based machine learning models and noise engin

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Evidence & attribution

First collected: 2026-09-20T20:52:10.320Z. This is not the publication date.